Robust Control of a Two-Axis Piezoelectric Nanopositioning Stage

• Main Authors: Chin-Hui Hsieh, 謝錦輝
• Other Authors: Fu-Cheng Wang
• Format: Others
• Language: zh-TW
• Published: 2010
• Online Access: http://ndltd.ncl.edu.tw/handle/07685060414972011135

碩士 === 臺灣大學 === 機械工程學研究所 === 98 === This thesis applies robust control to a two-axis piezoelectric nanopositioning stage. As semiconductor technology develops, the precision requirement for positioning platforms is increasingly stringent. Because the traditional mechanical transmission structure can no longer meet the requirements of high precision, we use piezoelectric actuators to drive the mechanism. The piezoelectric material can achieve precise position control because of it`s high resolution, high accuracy and large driving force. But the piezoelectric material has non-linear dynamic characteristics, such as hysteresis, that might degrade the system performance. Therefore, closed-loop controls are used to improve system stability and performance. At first, we identify the stage and define the nominal plant, where the nonlinear factors are regarded as system uncertainties. Using the nominal plant, we then design robust controllers. Finally, the designed controllers are implemented to the system for experimental verification. The results demonstrate the effectiveness of the robust controllers.