Robust Control of a Two-Axis Piezoelectric Nanopositioning Stage
碩士 === 臺灣大學 === 機械工程學研究所 === 98 === This thesis applies robust control to a two-axis piezoelectric nanopositioning stage. As semiconductor technology develops, the precision requirement for positioning platforms is increasingly stringent. Because the traditional mechanical transmission structure can...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/07685060414972011135 |