Integrating Production Scheduling and Maintenance -Ion Implantation Area Scheduling
碩士 === 臺灣大學 === 工業工程學研究所 === 98 === Ion implant area is one of the most important processes in semiconductor fabrication industry. The characteristic of this area is that the sequence for different kind of WIP type would affect the variation of machine failure rate.This means the scheduling decision...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/10083713904537576062 |