Development and application of a non-contact micro measurement center
碩士 === 國立臺灣師範大學 === 機電科技研究所 === 98 === Many side walls of micro holes and slots are not easily measured by current measuring instruments, such as: coordinate measuring machine, laser displacement meter, or high magnification toolmaker microscope. It is very difficult for overcoming the oxide layer o...
Main Authors: | Sheng-Min Lin, 林昇民 |
---|---|
Other Authors: | Shun-Tong Chen |
Format: | Others |
Language: | zh-TW |
Published: |
2009
|
Online Access: | http://ndltd.ncl.edu.tw/handle/90849192763978877833 |
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