Development and application of a non-contact micro measurement center

碩士 === 國立臺灣師範大學 === 機電科技研究所 === 98 === Many side walls of micro holes and slots are not easily measured by current measuring instruments, such as: coordinate measuring machine, laser displacement meter, or high magnification toolmaker microscope. It is very difficult for overcoming the oxide layer o...

Full description

Bibliographic Details
Main Authors: Sheng-Min Lin, 林昇民
Other Authors: Shun-Tong Chen
Format: Others
Language:zh-TW
Published: 2009
Online Access:http://ndltd.ncl.edu.tw/handle/90849192763978877833