Fabrication and Characteristic analysis of CIGS thin film by in-situ single target
碩士 === 國立臺南大學 === 材料科學系碩士班 === 98 === This study is concerned with CuInGaSe2 (CIGS) single target, it is deposited CIGS thin film by using RF sputtering method, then studying of CIGS thin-film characteristic and its analysis. So the setting of sputtering recipe will influence the characteristic of C...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/29710060386734402159 |