準垂直型雙擴散金氧半場效電晶體特性分析

碩士 === 國立清華大學 === 半導體元件及製程產業研發碩士專班 === 98 === English Abstract In this thesis computer aided simulation tools are used to design a Quasi Vertical Double Diffused Metal Oxide Semiconductor Field Effect Transistor (QVDMOSFET). The proposed new structure QVDMOSFET has breakdown voltage BVOFF = 99.64 V...

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Bibliographic Details
Main Authors: Tseng, Fu-Chun, 曾富群
Other Authors: Gong, J.
Format: Others
Language:en_US
Published: 2010
Online Access:http://ndltd.ncl.edu.tw/handle/98612909311637991747
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Summary:碩士 === 國立清華大學 === 半導體元件及製程產業研發碩士專班 === 98 === English Abstract In this thesis computer aided simulation tools are used to design a Quasi Vertical Double Diffused Metal Oxide Semiconductor Field Effect Transistor (QVDMOSFET). The proposed new structure QVDMOSFET has breakdown voltage BVOFF = 99.64 V ; specific turn-on resistance RON,SP = 120.90 mΩ x mm2; and area size = 28.0 x 1μm2) . This thesis provides the research results of structural effect influence on BVOFF and RON,SP in QVDMOSFET.