Factors and Influence of Boron Atoms Activation in Si1-xGex (x&lt;0.1) Thin Film Using Scanning Capacitance Microscopy

碩士 === 國立清華大學 === 工程與系統科學系 === 98

Bibliographic Details
Main Authors:	Kuok, Kun-Wa, 郭觀華
Other Authors:	Liang, Jenq-Horng
Format:	Others
Language:	zh-TW
Published:	2010
Online Access:	http://ndltd.ncl.edu.tw/handle/v44y63

http://ndltd.ncl.edu.tw/handle/v44y63

Factors and Influence of Boron Atoms Activation in Si1-xGex (x&amp;lt;0.1) Thin Film Using Scanning Capacitance Microscopy