CMOS-MEMS Neural Recording Probes with 4x4 Microelectrodes
碩士 === 國立清華大學 === 電子工程研究所 === 98 === The goal of this thesis is using CMOS integrated circuit (IC) technology (TSMC 0.35 ?慆 CMOS process) to combine with MEMS technology for implementing a novel CMOS-MEMS neural recording probe with suitable die-level post-fabrication. We design a voltage sensing bu...
Main Authors: | , |
---|---|
Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2010
|
Online Access: | http://ndltd.ncl.edu.tw/handle/88819096241562878977 |