The Study of Single Crystal Silicon H-Beam Thermal Actuator and its applications in MOEMS
博士 === 國立清華大學 === 動力機械工程學系 === 98
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/12617651193011759313 |