An investigation into Anti-adhesion Characteristics of the Nanoimprinting Roller Mold Using APPCVD
碩士 === 國立清華大學 === 動力機械工程學系 === 98 === In this study we use the Atmosphere Pressure Plasma Jet（APPJ） system to form an anti-adhesion coating on the imprinting mold, which could be flat or roller typed. It is fast, vacuum free and low temperature comparing to Self-assembled Monolayer by vapor phase de...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/36823487991830578606 |