A Study on Al/Ti/Submicron Diamond tube Ohmic Contacts
碩士 === 國立清華大學 === 材料科學工程學系 === 98 === A forest of diamond nanotubes were fabricated on the Boron Doped polycrystalline diamond/Si(100) substrate in a 13.56Hz radio frequency plasma enhanced chemical vapor deposition chamber by 100W power, for 12 hour etching time, at self bias voltage of -850~-950V...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/13809020937422593923 |