Fabrication of Quantum Dots Lasers of two dimensional Photonic Crystal Microcavity Structures

碩士 === 國立中山大學 === 光電工程學系研究所 === 98 === In the thesis, we fabricated the quantum dots lasers of 2D photonic crystal microcavity structures by E-beam lithography. The Al0.5Ga0.5As sacrificing layer beneath the Dwells structure is used for the purpose of suspending the active layer by air. Th...

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Bibliographic Details
Main Authors: Shr-Chiuan Huang, 黃世銓
Other Authors: Tsong-Sheng Lay
Format: Others
Language:zh-TW
Published: 2010
Online Access:http://ndltd.ncl.edu.tw/handle/74069782127705841331