Fabrication of Quantum Dots Lasers of two dimensional Photonic Crystal Microcavity Structures
碩士 === 國立中山大學 === 光電工程學系研究所 === 98 === In the thesis, we fabricated the quantum dots lasers of 2D photonic crystal microcavity structures by E-beam lithography. The Al0.5Ga0.5As sacrificing layer beneath the Dwells structure is used for the purpose of suspending the active layer by air. Th...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2010
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Online Access: | http://ndltd.ncl.edu.tw/handle/74069782127705841331 |