Modeling and Compensation for the Creep of Piezoelectric Actuators
碩士 === 國立高雄第一科技大學 === 系統資訊與控制研究所 === 98 === The rapid development of industry towarding miniaturization and high precision has driven mechanical technologies pursuing the era of sub-micro or even nano presision. A almost all the positioning or alignment applications are more demanding for high-preci...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/74316879197203147780 |