Design and Fabrication for a Novel MEMS Capacitive Microphone
碩士 === 國立高雄海洋科技大學 === 輪機工程研究所 === 98 === The Micro Electro Mechanical Systems (MEMS) has been used to design a new type of MEMS capacitive microphone. Coz the function of 3C products (example: mobile phone, PDA, etc.)Is daily enhanced. Development of low-cost, high-performance miniature microphone...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/41784444834385111333 |