Fabrication and properties of titanium dioxide based humidity sensorFabrication and properties of titanium dioxide based humidity sensorFabrication and properties of titanium dioxide based humidity sensor
碩士 === 國立高雄海洋科技大學 === 微電子工程研究所 === 98 === In environmental control, humidity detection is very important. In particular, precise humidity detection is necessary in the industry of high technology and manufacturing industries. Therefore, the sensors changed the structure to improve the sensing effect...
Main Authors: | , |
---|---|
Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2010
|
Online Access: | http://ndltd.ncl.edu.tw/handle/77449212040083603282 |