A Study of the ZnO Transparent Conductive Thin Film
碩士 === 南榮技術學院 === 工程科技研究所碩士班 === 98 === The R.F magnetron sputtering technique is employed in this study , thin films were deposited on the glass and silicon wafer by using the targets of ZnO, ZnO doped Al (2wt%, ZnO:Al), and ZnO doped Ti (1.5wt%, ZnO:Ti) materials. The atmosphere of reaction cham...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/84625597411838132230 |