The study of magnetic field for vacuum magnetron sputtering by finite element method
碩士 === 南榮技術學院 === 工程科技研究所 === 98 === Magnetron sputtering system is a modern one of the most important coating methods, with the high sputtering rate, high deposition rate, low substrate temperature, coating quality and good features, but the low target utilization is the disadvantage. Therefore how...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/72202303522072194656 |