Fabrication of Micro/Nano patterns with EWOD Actuation

碩士 === 國立中央大學 === 光電科學研究所 === 98 === Nanotechnology has become as the mainstream technology in the twenty-first century. Especially, the micro/nano patterning technology is also under rapid development to the needs of the various functional elements. However, the micro-fabrication technology, which...

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Bibliographic Details
Main Authors: Guo-Teng Hong, 洪國騰
Other Authors: Tsung-Hsun Yang
Format: Others
Language:zh-TW
Published: 2010
Online Access:http://ndltd.ncl.edu.tw/handle/17011653864418173049