Numerical simulation of the oxygen transport of the CZ silicon crystal growth process
碩士 === 國立中央大學 === 機械工程研究所 === 98 === The single crystallize-silicon (sc-si) is a major material for solar cell. Oxygen, one of the most important impurities in Czochralski (CZ) system, affects the efficiency of solar cells. There are three general methods to reduce the oxygen concentration in the...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/25266371600884824919 |