Fabricateion of 2-D periodic arrays of low-resistivity nickel silicide nanodots on (001)SiGe substrate
碩士 === 國立中央大學 === 化學工程與材料工程研究所 === 98 === In this study, we demonstrated that large-area, 2-D well-ordered arrays of Ni/amorphous-Si bilayer nandods were successfully fabricated on (001)Si0.7Ge0.3 substrate by nanosphere lithography. The phase transformated and structureal evolution of the Ni silici...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/55136903201301655313 |