Fabrication and Characterization of Novel Poly-Si Nanowire SONOS Devices
碩士 === 國立交通大學 === 電機學院微電子奈米科技產業專班 === 98 === In this thesis, poly-Si nanowire (NW) SONOS devices with various multiple-gated (MG) configurations were fabricated by utilizing a simple and low-cost technique. With a slight modification in the fabrication procedure, three different types of MG configur...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/09784184643964341317 |