The Special Gas Monitor Improvement in the Semiconductor CVD Utility Area

• Main Authors: Chang, Chiu-Kun, 張邱坤
• Other Authors: Chang, Edward
• Format: Others
• Language: zh-TW
• Published: 2010
• Online Access: http://ndltd.ncl.edu.tw/handle/11548346788142768245

碩士 === 國立交通大學 === 工學院碩士在職專班產業安全與防災組 === 98 === This paper focuses on special gas monitor in CVD utility areas. The study result is also to referable to all of the high technology fields such as DRAM, TFT LCD. CVD tools used a lot of special gas in process, such as silane,SiF4,NF3,NH3,ClF3,WF6,DCS,O3. The CVD utilities areas are presented the noise, high temperature, and abnormal vapor & fume. However, the safety attention from ISEP or equipment or facility guy is not enough. It seems a problem that no body knows the outgasing in CVD utilities areas. Gas monitor system (GMS) is a functional and available system in special gases detection. However, it seems rarely used for environment monitor. This paper just tries to adopt the GMS system that under sampling piping retrofit used in the CVD utilities areas. The methodology of this study is via FORD 8D, it is a good solution of TQM field, and the detail and 8Ds are sequential introduced below. D1:chose the topic and build up team, D2:description the problem and current situation，D3:executed and verified the temporary action(if necessary), D4:define and verify the root cause, D5:verify and check out the permanent solution, D6:executed the permanent solution and evaluated the effort, D7:Standize, D8: congratulation and future orientation. This methodology is suitable to promote to the widely fields, such as others tool efficiency evaluation, or others. Functional & available is the most important of the life safety system; it is also the basic requirement of the user and designer. The most efficiency of the system available evaluation is adopted in tool sign off stage. The topic of this paper called “The Special Gas Monitor Improvement of the CVD Utility Area”, it is hope to recall the system owners, safety professionals to review, enhance, and improve the safety system into a good condition. The devotion in safety is never fall down.