The Special Gas Monitor Improvement in the Semiconductor CVD Utility Area
碩士 === 國立交通大學 === 工學院碩士在職專班產業安全與防災組 === 98 === This paper focuses on special gas monitor in CVD utility areas. The study result is also to referable to all of the high technology fields such as DRAM, TFT LCD. CVD tools used a lot of special gas in process, such as silane,SiF4,NF3,NH3,ClF3,WF6,DCS,O...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/11548346788142768245 |