The Impact of Non-Uniformity in Photoresist Processing on Critical Dimension
碩士 === 國立交通大學 === 工學院碩士在職專班半導體材料與製程設備組 === 98 === The advancement of the computer science and technology has resulted in an increasing demand for memory chips such as dynamic random access memory (DRAM) and flash read-only memory (Flash-ROM) chips, etc. Manufacturers aim to develop chips that have m...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/00134907278869059138 |