The Impact of Non-Uniformity in Photoresist Processing on Critical Dimension

碩士 === 國立交通大學 === 工學院碩士在職專班半導體材料與製程設備組 === 98 === The advancement of the computer science and technology has resulted in an increasing demand for memory chips such as dynamic random access memory (DRAM) and flash read-only memory (Flash-ROM) chips, etc. Manufacturers aim to develop chips that have m...

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Bibliographic Details
Main Authors: Cho, Ching-Hua, 卓慶華
Other Authors: Leu, Jihperng
Format: Others
Language:en_US
Published: 2010
Online Access:http://ndltd.ncl.edu.tw/handle/00134907278869059138