The effect of thermal treatment on the material and nanomechanical properties of epitaxial SiGe thin films
博士 === 國立交通大學 === 機械工程學系 === 98 === Silicon-germanium (SiGe) alloy is one of the most attractive semiconductor materials because of its outstanding behaviors. Since then, SiGe have been applied to heterojunction bipolar transistor (HBT) as well as complementary metal-oxide-semiconductor (CMOS). Howe...
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| Format: | Others |
| Language: | en_US |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/01995558229076344705 |