The analysis of SONOS memory with embedded silicon nanocrystals in nitride
碩士 === 國立交通大學 === 電子物理系所 === 98 === We investigate the electrical properties of SONOS memories with embedded Si-nanocrystals（Si-NCs） in Si3N4. The capacitance-voltage（C-V） simulations identify the interface states at Si-substrate/SiO2 interface. Simulation results also obtain interface state densi...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/62256815788819724967 |