Investigation on LTPS-TFTs With High-κ Gate Dielectrics
碩士 === 國立交通大學 === 電子物理系所 === 98 === In this thesis, p-channel LTPS-TFTs with different thickness of the HfO2 gate dielectrics were fabricated and investigated. We compared the electrical characteristics and the NBTI reliability issue of the p-channel LTPS-TFTs with the different thickness of HfO2 ga...
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| Format: | Others |
| Language: | en_US |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/09326493248521225783 |