The Growth of Non-polar a-plane GaN by HVPE
碩士 === 國立交通大學 === 電子物理系所 === 98 === In this research, we first investigated the growth mechanism of non-polar a-plane GaN thick films on MOCVD template by hydride vapor phase epitaxy (HVPE). The surface morphology and crystal quality of a-plane GaN thick films were studied by various growth paramete...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/09953754008013346364 |