A Study on Device Characteristics and Hot-Carrier Effects of P-Channel Metal-Induced-Lateral Crystallized Poly-Si Thin-Film Transistors

碩士 === 國立交通大學 === 電子研究所 === 98 === In this study, we have fabricated a novel test structure to analyze the effects of location-dependent film crystallinity and reliability issues in p-channel MILC TFTs. By using this unique structure, impacts of the film crystallinity on device characteristics can b...

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Bibliographic Details
Main Authors: Lin, Tin-Fu, 林庭輔
Other Authors: Lin, Horng-Chih
Format: Others
Language:en_US
Published: 2010
Online Access:http://ndltd.ncl.edu.tw/handle/32c5a4