Fabrication of InAs quantum dot edge emitting lasers with dry etched mirror

Fabrication of InAs quantum dot edge emitting lasers with dry etched mirror

碩士 === 國立交通大學 === 電子研究所 === 98 === This thesis focus on fabrication of InAs quantum dot edge emitting lasers with dry etched mirror. First, we demonstrated a new process flow of edge emitting lasers with dry etched mirror formed by inductivity coupled plasma. Before fabrication of quantum dot edge e...

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Bibliographic Details
Main Authors: Wang, Hsiao-Wei, 王曉微
Other Authors: Lin, Gray
Format: Others
Language:zh-TW
Published: 2010
Online Access:http://ndltd.ncl.edu.tw/handle/86911891034822890800

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