Fabrication of InAs quantum dot edge emitting lasers with dry etched mirror
碩士 === 國立交通大學 === 電子研究所 === 98 === This thesis focus on fabrication of InAs quantum dot edge emitting lasers with dry etched mirror. First, we demonstrated a new process flow of edge emitting lasers with dry etched mirror formed by inductivity coupled plasma. Before fabrication of quantum dot edge e...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/86911891034822890800 |