The Carrier Transport and Channel Backscattering Characteristics of Nanoscale Schottky-Barrier MOSFETs

碩士 === 國立交通大學 === 電子工程系所 === 98 === In advanced VLSI devices, a lot of new structures have been brought up for enhancing drain current such as strained-Si channel, high-κ dielectric, metal gate and metal source/drain. In the nanoscale channel length, the channel backscattering theory has been applie...

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Bibliographic Details
Main Authors: Teng, An-Shun, 鄧安舜
Other Authors: Chung, Steve S.
Format: Others
Language:en_US
Published: 2009
Online Access:http://ndltd.ncl.edu.tw/handle/27151385660472349230