An Investigation of the Flow Field Improvement of Automatic Material Handling System in the TFT-LCD Array & Cell Process Fabs
碩士 === 國立交通大學 === 工學院碩士在職專班精密與自動化工程組 === 98 === The aim of this study is to solve a device in TFT-LCD class 1000 Fab clean room to connect front-end cleanliness Class 100 of the Array process and the cleanliness Class 100、Class 10 of the Cell process AMHS stocker dust particles pollution problems....
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/71760312466129001688 |