| Summary: | 碩士 === 國立交通大學 === 工學院碩士在職專班永續環境科技組 === 98 === The varieties of greenhouse gas are SF6、C4H8、NF3、C2F6、C3F8、C4F8 --- and so on exhausted by Taiwan's semiconductor companies. In order to meet the environmental requirements, Taiwan Semiconductor Industry Association requested semiconductor companies to set up relevant exhausting treatment systems in the process. As the process and the utility of water quantity at 6” and 8” fab are not so huge at early stages, the effluent from local scrubber generally was drained to the wastewater end (eq, fluoride-containing wastewater). However, as the technology developed increasingly in recent years, and the effluent from of loal scrubbers increased greatly after the establishment of 12”fab. Each company has to set up the local scrubber water recycling system to harmony with the reuse percentage and regulatory requirements. As the multi-pollutant and law concentration of local scrubber displacement, pollutant concentrations changed so much and polluted pure water system easily if recycled to pure water system. Each semi-conductor company conducts the water reuse with the way of closed system.
This research basis on personal experience was to collect relevant local scrubber documentation of each company. The system program design as well as the subcontract is porposed. Then the major success elements of sobcontract and program for the reference of others were listed. The major success elements mentioned above include (1) the professional experience of leading staff in water treatment field (2) the progress of engineering balance control and the payment effeciency to harmony with the operation of the company’s assets (3) the adjustment of the construction schedule according to the company's production capacity needs (4) the well communication between the leading staff and relevant vendors during the designed program (5) the financial soundness of the contractor (6) the will of constractor to constract the project (7) the schedule control and the progress report to the supervisors (8) the reasonable profit can be the benefit of engineering project quality and after-sales service (9) the good chanel of communication through regular daily, weekly and monthly meeting (10) the trusted degree by supervisors and vendors.
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