Development on Subcontract Management for Water Recovery System at Local Scrubbers in the Semiconductor Industry
碩士 === 國立交通大學 === 工學院碩士在職專班永續環境科技組 === 98 === The varieties of greenhouse gas are SF6、C4H8、NF3、C2F6、C3F8、C4F8 --- and so on exhausted by Taiwan's semiconductor companies. In order to meet the environmental requirements, Taiwan Semiconductor Industry Association requested semiconductor compani...
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Format: | Others |
Language: | zh-TW |
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2009
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Online Access: | http://ndltd.ncl.edu.tw/handle/80599359403359713477 |