Fabrication of Seamless Roller Imprinting Molds Based on Inner Cylindrical Surface Photolithography
碩士 === 國立成功大學 === 奈米科技暨微系統工程研究所 === 98 === This thesis develops an innovative way of using inner cylindrical surface photolithography to create a seamless roller imprinting mold which can be used to fabricate micro-structure on substrates in a roll-to-roll process. Firstly, a layer of photo-resist (...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2010
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Online Access: | http://ndltd.ncl.edu.tw/handle/38234522881915683686 |