Fabrication of Seamless Roller Imprinting Molds Based on Inner Cylindrical Surface Photolithography

碩士 === 國立成功大學 === 奈米科技暨微系統工程研究所 === 98 === This thesis develops an innovative way of using inner cylindrical surface photolithography to create a seamless roller imprinting mold which can be used to fabricate micro-structure on substrates in a roll-to-roll process. Firstly, a layer of photo-resist (...

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Bibliographic Details
Main Authors: Shr-RenHuang, 黃世仁
Other Authors: Yung-Chun Lee
Format: Others
Language:zh-TW
Published: 2010
Online Access:http://ndltd.ncl.edu.tw/handle/38234522881915683686