Design, Manufacturing and Control of Piezo-Stage
碩士 === 國立成功大學 === 機械工程學系碩博士班 === 98 === The purpose of this thesis is to design and manufacture piezo-stage, additionally, this thesis focus on control the piezo-stage such that can be achieved precision positioning. Positioning error in piezo-stage occurs due to the hysteresis effect of piezo actua...
| Main Authors: | , |
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| Format: | Others |
| Language: | en_US |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/28986401735093914295 |