Investigations of Seedless Cu Diffusion Barriers for Advanced Cu Metallization
博士 === 國立成功大學 === 微電子工程研究所碩博士班 === 98 === This dissertation mainly investigates the improved barrier performance of seedless Cu diffusion barriers for advanced Cu metallization. The contents are primary divided into three distinct techniques. Two of them are aimed at improving the barrier properties...
| Main Authors: | , |
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| Format: | Others |
| Language: | en_US |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/88546921109146900245 |