Studies of the High Performance Pd–SnOx / i-diamond / p+ diamond (CAIS) Diode Carbon Monoxide Gas Sensor with Nano-tip Structure
碩士 === 國立成功大學 === 微電子工程研究所碩博士班 === 98 === The Catalyst/ SnOx/ i-diamond/ p+-diamond p+-silicon (CAIS) diodes with a nano tip structure are prepared by a Bias-assisted Hot-wire chemical vapor deposition (BAHWCVD) system for carbon monoxide (CO) gas sensing applications. With the added DC bias, a bett...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2010
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Online Access: | http://ndltd.ncl.edu.tw/handle/77876226457438874534 |