Design and Fabrication of a Capacitive Micro Accelerometer by CMOS-MEMS

碩士 === 國立成功大學 === 微電子工程研究所碩博士班 === 98 === This thesis is contained multi-axis MEMS capacitive accelerometer. It constructs the 3D model easily and uses the finite element method (FEM) to simulate the mechanical equation by CoventorWare which is MEMS simulation software. It also provides the optimum...

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Bibliographic Details
Main Authors: Chih-WeiHuang, 黃志偉
Other Authors: Yeong-Her Wang
Format: Others
Language:zh-TW
Published: 2010
Online Access:http://ndltd.ncl.edu.tw/handle/29550318941063087026