Structural and Optical properties of MgZnO thin film grown by sputtering
碩士 === 國立成功大學 === 材料科學及工程學系碩博士班 === 98 === MgxZn1-xO alloy deposited onto silicon wafer using sputtering. Deposition parameter varied in this process, temperature and magnesium content. Structural and optical properties studied by several characterization including, x-ray diffraction, scanning elect...
| Main Authors: | , |
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| Format: | Others |
| Language: | en_US |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/92771519681959107185 |