Study of TiO2 Nanotube Arrays Based Gas Sensors
碩士 === 國立成功大學 === 化學工程學系碩博士班 === 98 === In this study, the TiO2 nanotube arrays (NTAs)/quartz fabricated by anodization were used as resistive-type gas sensors. Firstly, a thin Ti film was deposited on the quartz substrate by RF sputtering. Subsequently, the sample was anodized in an NH4F-H2O-EG ele...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/66993330159249546605 |