Using Statistics Model to forcast production machine performance
碩士 === 國立成功大學 === 工業與資訊管理學系專班 === 98 === Abstract Current semiconductor factory is based on process tool performance to control product quality. If there is no advanced process control system to control process performance, un-stable tool performance will impact product quality directly. It’s impor...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/91308524521170810470 |