Development of a high precise optical measuring system for the linear moving stage
博士 === 國立成功大學 === 工程科學系碩博士班 === 98 === In recent years, the linear moving stage is a main part of the high precise equipment. Because of the increasing requirement of precise equipment and the improvement of the manufacturing precision, the research of measurement systems for linear moving stages ha...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/73494086487842801276 |