Improvement of water treatment for the cooling tower water system in a semi-conductor facility
碩士 === 國立勤益科技大學 === 冷凍空調系 === 98 === In the semiconductor industry application, the process waste water was recycled mostly as the make-up cooling water of cooling tower for chiller units to save the dramatic water consumption. However, the recyeled water from process have the characteristic of bein...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/78053494147805365162 |