Static and dynamic mechanical properties measurement of micro-nano metal thin film using cantilever beam deflection
碩士 === 國立中興大學 === 精密工程學系所 === 98 === Microelectromechanical systems (MEMS) technologies are developing rapidly with increasing study of the design, fabrication and commercialization of microscale systems and devices. Continued growth of Microsystems technologies requires still further miniaturizatio...
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| Format: | Others |
| Language: | zh-TW |
| Online Access: | http://ndltd.ncl.edu.tw/handle/85056673008780622955 |