Multilayer and graded silicon thin film solar cells prepared by modulation of hydrogen dilution
碩士 === 國立中興大學 === 電機工程學系所 === 98 === In this thesis, 13.56 MHz plasma-enhanced chemical vapor deposition (PECVD) with pulse modulation of RF plasma is used to fabricate the single-layer, hydrogenated protocrystal silicon/hydrogenated amorphous silicon (pc-Si:H/a-Si:H) multilayer and graded-layer int...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/54490352119999713171 |