Fabrication and applications of nanopore array on silicon
碩士 === 國立中興大學 === 機械工程學系所 === 98 === In this study, a novel method for the fabrication of high aspect ratio silicon nanoporous arrays is developed. At the beginning, the photolithographic process was implemented to pattern micro-porous arrays on an N-type silicon wafer. The pre-etching by KOH was th...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/35146447041909896845 |